熱質式流量計

Name

Thermal Mass Flow Meter

Fluids

Non-corrosive Gas

Flow Range

0~10 SCCM to 0~50 SLM

Process Connection

1/4”NPT female

Output Signal

0~5V

Minimum Load

1000Ω

Material

Wetted Part - SS316

O-ring - Viton

Accuracy

±1.5%FS (for 10 SCCM ~ 5 SLM)

±5%FS (0~25% Flow Range)

±2%FS (25~100% Flow Range)

Repeatability

±0.15%FS or better

Turndown Ratio

50:1

Input Power

24VDC / 15VDC / 12VDC

Electric Connection

5 Pin post header with mating connector

Minimum Pressure

40”H₂O

Maximum Pressure

500 PSIG

Temperature Range

0~50℃

Response Time

1 second

Temp. Coefficient

0.05%FS per 1℃ or better

Pressure Coefficient

0.01%FS per PSIG or better

Certification

CE

Weight

App. 0.5kg